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Design and Analysis of 6-DOF Thermal Micro Actuator

In this project, a thermal micro actuator has been geometrically design based on various boundary conditions (Thermal, displacement and voltage boundary conditions on the end of each edge).


The design target was the amount of net upward displacement in the top plane of the sensor due to change in the input conditions. There are some limitation to the design about the resulted plane movement consequently, each edge thickness played a major role for the purpose.

The project was accomplished with ANSYS and programmed with APDL code. One design loop results are depicted bellow.

The Designed Micro Actuator



Temperature, displacement and voltage boundary conditions

Upward Displacement Contour

Temperature contour

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